Activation of
High-temperature-implanted Phosphorus Atoms in 4H-SiC by Atmospheric
Pressure Thermal Plasma Jet Annealing |
Hiroaki Hanafusa, Hiroshima University, Japan |
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Activation Trends in Millisecond
Annealing of Heavy n-Type Doping of Silicon |
Paul
Timans, Mattson Thermal Products GmbH, Germany |
|
Analyses of 3D atomic arrangements
of impurity atoms doped in Silicon by spectro-photoelectron
holography technique |
Kazuo
Tsutsui, Tokyo Institute of Technology, Japan |
|
Au-based and Au-free Ohmic
Contacts to AlGaN/GaN Structures on Silicon or Sapphire Substrates |
Hong-Yu Yu, Southern University of Science and Technology, China |
|
CMOS-Compatible Contact Technology
for Si Photonics |
Philipp Rodriguez, Univ. Grenoble Alpes, France |
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H2 PLAD Hydrogenation Process on
3D NAND Array Poly-Si Access Devices |
Shu
Qin, QinTek, Co., USA |
|
Monolayer doping and other
strategies in high surface-to volume-ratio silicon devices |
Ray
Duffy, Tyndall National Inst., Ireland |
|
Novel photodetector based on
FD-SOI substrate with interface coupling effect |
Jing
Wan, Fudan University, China |
|
Novel titanium based contacts
featuring ultralow contact resistivities and enhanced
compatibilities to advanced CMOS technology |
Hao
Yu, IMEC, Belgium |
|
On the manifestation of Ge
Pre-amorphization Implantation (PAI) Impact on Both the Formation of
Ultrathin TiSix and the Specific Contact Resistivity in TiSix/n-Si
Contacts for sub-16/14 nm nodes and beyond |
Jun
Luo, IMECAS, China |
|
Opportunities for breaking an
energy generation limit of photovoltaic using multijunction and
super-multijunction cells |
Kenji
Araki , Toyota Technological Institute, Japan |
|
Light Plastic Integrated Micro CPV
Module: PIC with Three-Junction PV cells |
Michihiko Takase, Panasonic Corporation, Japan |
|
Gate stack and Ni(SiGeSn) metal
contacts formation on low bandgap strained (Si)Ge(Sn) semiconductors |
Dan
Buca, Peter Gr┨nberg Institute (PGI 9) and JARA-FIT, Germany |
|
High-performance heterojunctions
based on 2D semiconductors |
Yanqing Wu, Huazhong University of Science and Technology, China |
|
Damage recovery and strain induced
by Phosphorous in Laser Annealed Ge |
Simona Boninelli, IMM-CNR, Italy |
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Interfacial passivation by LiF or
PbF2 for high efficiency perovskite solar cell |
Yiqiang Zhan, Fudan University, China |
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